Memory Device Manufacturing Method

ABSTRACT

A method for making a memory device includes providing a dielectric material, having first and second upwardly and inwardly tapering surfaces and a surface segment connecting the first and second surfaces. First and second electrodes are formed over the first and second surfaces. A memory element is formed over the surface segment to electrically connect the first and second electrodes.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of U.S. application Ser.No. 11/279,945 filed 17 Apr. 2006.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to high density memory devices based onmemory materials, for example resistor random access memory (RRAM)devices, the memory material switchable between electrical propertystates by the application of energy. The memory materials may be phasechange based memory materials, including chalcogenide based materialsand other materials, and to methods for manufacturing such devices.

2. Description of Related Art

Phase change based memory materials are widely used in read-writeoptical disks. These materials have at least two solid phases, includingfor example a generally amorphous solid phase and a generallycrystalline solid phase. Laser pulses are used in read-write opticaldisks to switch between phases and to read the optical properties of thematerial after the phase change.

Phase change based memory materials, like chalcogenide based materialsand similar materials, also can be caused to change phase by applicationof electrical current at levels suitable for implementation inintegrated circuits. The generally amorphous state is characterized byhigher resistivity than the generally crystalline state; this differencein resistance can be readily sensed to indicate data. These propertieshave generated interest in using programmable resistive material to formnonvolatile memory circuits, which can be read and written with randomaccess.

The change from the amorphous to the crystalline state is generally alower current operation. The change from crystalline to amorphous,referred to as reset herein, is generally a higher current operation,which includes a short high current density pulse to melt or breakdownthe crystalline structure, after which the phase change material coolsquickly, quenching the phase change process, allowing at least a portionof the phase change structure to stabilize in the amorphous state. It isdesirable to minimize the magnitude of the reset current used to causetransition of phase change material from crystalline state to amorphousstate. The magnitude of the reset current needed for reset can bereduced by reducing the size of the phase change material element in thecell and by reducing the size of the contact area between electrodes andthe phase change material, so that higher current densities are achievedwith small absolute current values through the phase change materialelement.

One direction of development has been toward forming small pores in anintegrated circuit structure, and using small quantities of programmableresistive material to fill the small pores. Patents illustratingdevelopment toward small pores include: Ovshinsky, “Multibit Single CellMemory Element Having Tapered Contact,” U.S. Pat. No. 5,687,112, issuedNov. 11, 1997; Zahorik et al., “Method of Making Chalogenide [sic]Memory Device,” U.S. Pat. No. 5,789,277, issued Aug. 4, 1998; Doan etal., “Controllable Ovonic Phase-Change Semiconductor Memory Device andMethods of Fabricating the Same,” U.S. Pat. No. 6,150,253, issued Nov.21, 2000.

Problems have arisen in manufacturing such devices with very smalldimensions, and with variations in process that meet tightspecifications needed for large-scale memory devices. It is desirabletherefore to provide a memory cell structure having small dimensions andlow reset currents, and a method for manufacturing such structure.

SUMMARY OF THE INVENTION

A first aspect of the invention is directed to a method for making amemory device. A dielectric material, having first and second upwardlyand inwardly tapering surfaces and a surface segment connecting thefirst and second surfaces, is provided. First and second electrodes areformed over the first and second surfaces. A memory element is formedover the surface segment to electrically connect the first and secondelectrodes.

A second aspect of the invention is directed to a method for making amemory device of the type including a bridge-type memory materialelement switchable between electrical property states by the applicationof energy. An electrode structure, comprising first and second electrodeelements separated by a separation material, is formed. A dielectricmaterial is deposited onto an end surface of the separation materialusing a high density plasma (HDP) deposition procedure. The depositionof the dielectric material is controlled to create a dielectric materialcap on the end surface, the dielectric material cap having upwardly andinwardly tapering surfaces. An electrically conductive material isdeposited to contact the electrode elements and to extend along thetapering sides of the dielectric material thus creating first and secondelectrodes. The electrically conductive material and the dielectricmaterial cap are planarized to create first and second outer surfaces onthe first and second electrodes and a surface segment on the dielectricmaterial. The surface segment connects the tapering sides and has alength measured between the tapering sides. At least one of thedielectric material depositing step and the planarizing step iscontrolled so that the length is within a chosen dimensional range. Abridge-type memory material element is formed over the surface segmentand in electrical contact with portions of the first and second outersurfaces. Energy passing along an inter-electrode path between the firstand second electrodes and across the surface segment of the dielectricmember is concentrated within the memory material element so tofacilitate changing an electrical property state of the memory materialelement.

The method described herein for formation of a memory cell device and,for example, in an RRAM device, can be used to make small phase changegates, bridges or similar structures for other devices.

Various features and advantages of the invention will appear from thefollowing description in which the preferred embodiments have been setforth in detail in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified cross-sectional view of a memory device madeaccording to the invention;

FIGS. 2-9 illustrate methods for making memory devices, such as thedevice of FIG. 1;

FIG. 2 illustrates the result of the formation of lower electrodeelements on a base covered by protective elements;

FIG. 3 illustrates the result of depositing a separation material ontothe structure of FIG. 2;

FIG. 4 illustrates the result of etching the protective elements fromthe structure of FIG. 3 to expose the lower electrode elements;

FIG. 5 shows the result of depositing a dielectric material using ahigh-density plasma deposition procedure;

FIGS. 6 and 7 are simplified illustrations of generally straight andstair-stepped tapered surfaces;

FIG. 8 shows the structure of FIG. 5 after removal of the dielectricmaterial from the lower electrode elements followed by depositing anelectrically conductive material onto the structure; and

FIG. 9 shows the structure of FIG. 8 after a chemical mechanicalpolishing step.

DETAILED DESCRIPTION

The following description of the invention will typically be withreference to specific structural embodiments and methods. It is to beunderstood that there is no intention to limit the invention to thespecifically disclosed embodiments and methods but that the inventionmay be practiced using other features, elements, methods andembodiments. Like elements in various embodiments are commonly referredto with like reference numerals.

FIG. 1 shows a memory device 10 having first and second electrodes 12,14 on an intermetallic dielectric base 16. Each electrode comprises alower electrode element 18, typically comprising tungsten, aluminum,copper, other metals commonly used in integrated circuit manufacturing,or other conductive material, adjacent to base 16 and an upper electrodeelement 20, typically made of TiN. Electrodes 12, 14 are separated by anelectrode separation element 22. Electrode separation element includes alower portion 24 of a separation material, typically a dielectric fillsuch as silicon dioxide, and an upper portion 26. Upper portion 26 hasupwardly and inwardly tapering sides 28, the sides being joined by asurface segment 30. Upper portion 26 is made of a dielectric materialdeposited using high-density plasma (HDP) deposition procedures asdiscussed below. A bridge-type memory material element 32 is positionedon the surface segment 30 and extends over and contacts the outersurface 34 of upper electrode element 20 of first and second electrodes12, 14. As indicated by arrow 36, current flows along an inter-electrodepath between first and second electrodes and through memory materialelement 32 causing the central, active region 38 to change one or moreelectrical characteristics, such as resistance, upon the application ofan appropriate current flow.

FIGS. 2-9 illustrate steps for creating memory device 10, as well asother memory devices, according to the invention. In FIG. 2 lowerelectrode elements 18 are formed on base 16 and have protective capelements 40 formed thereon. Elements 40 are typically made of SiN oranother suitable protective material and act as a protective layer forlower electrode elements 18 during subsequent processing steps. FIG. 3shows a separation material 42 deposited on the structure of FIG. 2followed by chemical mechanical polishing (CMP) to create an end surface44. In FIG. 4 open regions 46 are formed by the removal of elements 40.Open regions 46 of are bounded by lower electrode elements 18 and insidesurfaces 48 of separation material 42.

FIG. 5 illustrates the result of the HDP CVD deposition of a dielectricmaterial 50 creating cap 26. In addition to being deposited on endsurface 44, dielectric material 50 is also deposited on side surfaces 48and lower electrode elements 18.

During HDP CVD deposition both deposition and etching occurs to createthe characteristic triangular shape with upwardly and inwardly taperingsurfaces. General information on the HDP process can be found in thetextbook “Introduction to Semiconductor Manufacturing Technology” inchapter 10 Section 7 (10.7).

One recipe that can be used to control the ratio of deposition toetching during the HDP CVD process to achieve the desired height, shapeand taper angles is as follows.

1. SiH4: 95 sccm/Ar: 390 sccm/O2: 150 sccm/Plasma Heat ˜300C/Top plasmapower 3550 W/Bottom Plasma power 2700 W/He: 8 sccm.

2. The Etch/dep ratio of HDP process could be controlled by Top plasmapower & Bottom Plasma Power. Higher Plasma power will increase theplasma etch rate and increase the Etch/dep ratio because plasma Etch isenhanced.

Tapering surfaces 28 are illustrated as straight lines in FIG. 5. FIG. 6illustrates an example of generally straight tapering surfaces 28 whileFIG. 7 illustrates stair-stepped tapering surfaces 28. Other types oftapering surfaces 28 may also be created.

The dielectric material 50 covering lower electrode elements 18 isetched to expose the lower electrode elements 18. This is preferablyaccomplished using a slightly anisotropic etch procedure. FIG. 8illustrates the result of depositing an electrically conductive material52 onto the structure of FIG. 5 after this etch procedure. Material 52may be TiN because of its good compatibility with memory materialelement 32; other appropriate materials may also be used. FIG. 9illustrates results of a CMP process to create first and secondelectrodes 12, 14 having outer surfaces 54 and surface segment 30. Inthe preferred embodiment outer surfaces 54 and surface segment 30 arecoplanar. However, in some cases they need not be coplanar. The length56 of surface segment 30 is typically about 10 to 100 nm, and in oneembodiment is about 20 nm long. The angle between tapering surfaces 28and the length 56 of surface segment 30 affects the amount of chemicalmechanical polishing that must be done to the structure of FIG. 8 toachieve the structure of FIG. 9.

Thereafter memory material element 32, see FIG. 1, is formed on surfacesegment 30 so to contact outer surfaces 54 of first and secondelectrodes 12. Memory material element 32 is typically GST but, asdiscussed below, memory material element 32 could be made of othermaterials as well. The length of contact between memory material element32 and surfaces 54 should be sufficient to provide effective electricalcontact between the surfaces, and to allow for alignment tolerances ofthe photolithographic process used in patterning the memory materialelement, without being excessively long. The thickness of memorymaterial element 32 (the vertical height in FIG. 1) is small as ispractical given the material chosen and its manner of deposition. ForGST, the thickness is typically about 10 to 50 nm, and in one embodimentis about 20 nm. The width of memory material element 32 (the dimensioninto the page in FIG. 1) is typically about 40 to 100 nm, and againshould be as small as practical given the material chosen and the mannerin which the pattern is defined; in one embodiment the width of memorymaterial 32 is about 30˜100 nm.

One of the advantages of the present invention is that the currentneeded to, for example, change the resistance of memory material element32 at central region 38 is reduced because the volume of phase changematerial in the central, active region is very small. The inventionfacilitates scaling so that the process should work as criticaldimensions on chips shrink.

Another advantage of the invention is that two of the dimensions formemory material element 32, that is length 56 and the thickness(measured in the vertical direction in the figures) of element 32, arenot dependent upon lithographic techniques. In addition, while thelocation of and length of memory material element 32 are typicallydetermined by lithographic techniques, neither is critical because theamount of overlap between memory material 32 and surface 34 of theelectrodes can vary within a relatively wide range of distances.

The length 56 of surface segment 30 is not pattern defined, that is notdefined by photolithography, and not by etch selectivity, as in thesidewall methods. Rather, length 56 is defined by the CMP process, andthe control over the stop point of the CMP.

Upper electrode elements 20 in the illustrated embodiment are preferablymade of TiN. Although other materials, such as TaN, TiAlN or TaAlN, maybe used for upper electrode elements 20, TiN is presently preferredbecause it makes good contact with GST as memory material element 32, itis a common material used in semiconductor manufacturing, and itprovides a good diffusion barrier at the higher temperatures at whichGST-type of memory material transitions, typically in the 600-700° C.range.

Embodiments of memory device 10 include phase change based memorymaterials, including chalcogenide based materials and other materials,for memory material element 32. Chalcogens include any of the fourelements oxygen (O), sulfur (S), selenium (Se), and tellurium (Te),forming part of group VI of the periodic table. Chalcogenides comprisecompounds of a chalcogen with a more electropositive element or radical.Chalcogenide alloys comprise combinations of chalcogenides with othermaterials such as transition metals. A chalcogenide alloy usuallycontains one or more elements from column six of the periodic table ofelements, such as germanium (Ge) and tin (Sn). Often, chalcogenidealloys include combinations including one or more of antimony (Sb),gallium (Ga), indium (In), and silver (Ag). Many phase change basedmemory materials have been described in technical literature, includingalloys of: Ga/Sb, In/Sb, In/Se, Sb/Te, Ge/Te, Ge/Sb/Te, In/Sb/Te,Ga/Se/Te, Sn/Sb/Te, In/Sb/Ge, Ag/In/Sb/Te, Ge/Sn/Sb/Te, Ge/Sb/Se/Te andTe/Ge/Sb/S. In the family of Ge/Sb/Te alloys, a wide range of alloycompositions may be workable. The compositions can be characterized asTe_(a)Ge_(b)Sb100_(-(a+b)).

One researcher has described the most useful alloys as having an averageconcentration of Te in the deposited materials well below 70%, typicallybelow about 60% and ranged in general from as low as about 23% up toabout 58% Te and most preferably about 48% to 58% Te. Concentrations ofGe were above about 5% and ranged from a low of about 8% to about 30%average in the material, remaining generally below 50%. Most preferably,concentrations of Ge ranged from about 8% to about 40%. The remainder ofthe principal constituent elements in this composition was Sb. Thesepercentages are atomic percentages that total 100% of the atoms of theconstituent elements. (Ovshinsky '112 patent, columns 10-11.) Particularalloys evaluated by another researcher include Ge₂Sb₂Te₅, GeSb₂Te₄ andGeSb₄Te₇. (Noboru Yamada, “Potential of Ge—Sb—Te Phase-Change OpticalDisks for High-Data-Rate Recording”, SPIE v.3109, pp. 28-37 (1997).)More generally, a transition metal such as chromium (Cr), iron (Fe),nickel (Ni), niobium (Nb), palladium (Pd), platinum (Pt) and mixtures oralloys thereof may be combined with Ge/Sb/Te to form a phase changealloy that has programmable resistive properties. Specific examples ofmemory materials that may be useful are given in Ovshinsky '112 atcolumns 11-13, which examples are hereby incorporated by reference.

Phase change alloys are capable of being switched between a firststructural state in which the material is in a generally amorphous solidphase, and a second structural state in which the material is in agenerally crystalline solid phase in its local order in the activechannel region of the cell. These alloys are at least bistable. The termamorphous is used to refer to a relatively less ordered structure, moredisordered than a single crystal, which has the detectablecharacteristics such as higher electrical resistivity than thecrystalline phase. The term crystalline is used to refer to a relativelymore ordered structure, more ordered than in an amorphous structure,which has detectable characteristics such as lower electricalresistivity than the amorphous phase. Typically, phase change materialsmay be electrically switched between different detectable states oflocal order across the spectrum between completely amorphous andcompletely crystalline states. Other material characteristics affectedby the change between amorphous and crystalline phases include atomicorder, free electron density and activation energy. The material may beswitched either into different solid phases or into mixtures of two ormore solid phases, providing a gray scale between completely amorphousand completely crystalline states. The electrical properties in thematerial may vary accordingly.

Phase change alloys can be changed from one phase state to another byapplication of electrical pulses. It has been observed that a shorter,higher amplitude pulse tends to change the phase change material to agenerally amorphous state. A longer, lower amplitude pulse tends tochange the phase change material to a generally crystalline state. Theenergy in a shorter, higher amplitude pulse is high enough to allow forbonds of the crystalline structure to be broken and short enough toprevent the atoms from realigning into a crystalline state. Appropriateprofiles for pulses can be determined, without undue experimentation,specifically adapted to a particular phase change alloy. A materialuseful for implementation of an RRAM device described herein isGe₂Sb₂Te₅, commonly referred to as GST. Other types of phase changematerials can also be used.

The invention has been described with reference to phase changematerials. However, other memory materials, also sometimes referred toas programmable materials, can also be used. As used in thisapplication, memory materials are those materials having electricalproperties, such as resistance, that can be changed by the applicationof energy; the change can be a stepwise change or a continuous change ora combination thereof. Other programmable resistive memory materials maybe used in other embodiments of the invention, including N₂ doped GST,Ge_(x)Sb_(y), or other material that uses different crystal phasechanges to determine resistance; Pr_(x)Ca_(y)MnO₃, PrSrMnO, ZrO_(x), orother material that uses an electrical pulse to change the resistancestate; 7,7,8,8-tetracyanoquinodimethane (TCNQ), methanofullerene6,6-phenyl C61-butyric acid methyl ester (PCBM),TCNQ-PCBM, Cu-TCNQ,Ag-TCNQ, C₆₀-TCNQ, TCNQ doped with other metal, or any other polymermaterial that has bistable or multi-stable resistance state controlledby an electrical pulse. Further examples of programmable resistivememory materials include GeSbTe, GeSb, NiO, Nb—SrTiO₃, Ag—GeTe, PrCaMnO,ZnO, Nb₂O₅, Cr—SrTiO₃.

The following are short summaries describing four types of resistivememory materials.

1. Challecogenide Material

Ge_(x)Sb_(y)Te_(z)

x:y:z=2:2:5

Or other compositions with x: 0˜5; y: 0˜5; z: 0˜10

GeSbTe with doping, such as N-, Si-, Ti-, or other element doping mayalso be used.

Formation method: By PVD sputtering or magnetron-sputtering method withreactive gases of Ar, N₂, and/or He, etc @ the pressure of 1 mtorr˜100mtorr. The deposition is usually done at room temperature. Thecollimater with aspect ratio of 1˜5 can be used to improve the fill-inperformance. To improve the fill-in performance, the DC bias of severalten to several hundred volts is also used. On the other hand, thecombination of DC bias and the collimater can be used simultaneously.

The post deposition annealing treatment with vacuum or N2 ambient issometimes needed to improve the crystallize state of challecogenidematerial. The annealing temperature typically ranges 100C to 400C withan anneal time of less than 30 minutes.

The thickness of challecogenide material depends on the design of cellstructure. In general, a challecogenide material with thickness ofhigher than 8 nm can have a phase change characterization so that thematerial exhibits at least two stable resistance states.

2. CMR (Colossal Magnetoresistance) Material

Pr_(x)Ca_(y)MnO₃

x:y=0.5:0.5

Or other compositions with x: 0˜1; y: 0˜1

Another CMR material that includes Mn oxide may be used

Formation method: By PVD sputtering or magnetron-sputtering method withreactive gases of Ar, N₂, O₂, and/or He, etc. at the pressure of 1mtorr˜100 mtorr. The deposition temperature can range from roomtemperature to ˜600C, depending on the post deposition treatmentcondition. A collimater with an aspect ratio of 1˜5 can be used toimprove the fill-in performance. To improve the fill-in performance, theDC bias of several ten to several hundred volts is also used. On theother hand, the combination of DC bias and the collimater can be usedsimultaneously. A magnetic field of several ten gauss to 10,000 gaussmay be applied to improve the magnetic crystallized phase.

The post deposition annealing treatment with vacuum or N₂ ambient orO₂/N₂ mixed ambient may be needed to improve the crystallized state ofCMR material. The annealing temperature typically ranges 400C to 600Cwith an anneal time of less than 2 hours.

The thickness of CMR material depends on the design of cell structure.The CMR thickness of 10 nm to 200 nm can be used to be the corematerial.

A buffer layer of YBCO (YBaCuO3, a kind of high temperaturesuperconductor material) is often used to improve the crystallized stateof CMR material. The YBCO is deposited before the deposition of CMRmaterial. The thickness of YBCO ranges 30 nm to 200 nm.

3. 2-Element Compound

Ni_(x)O_(y); Ti_(x)O_(y); Al_(x)O_(y); W_(x)O_(y); Zn_(x)O_(y);Zr_(x)O_(y); Cu_(x)O_(y); etc

x:y=0.5:0.5

Other compositions with x: 0˜1; y: 0˜1

Formation method:

1. Deposition: By PVD sputtering or magnetron-sputtering method withreactive gases of Ar, N₂, O₂, and/or He, etc. at the pressure of 1mtorr˜100 mtorr, using a target of metal oxide, such as Ni_(x)O_(y);Ti_(x)O_(y); Al_(x)O_(y); W_(x)O_(y); Zn_(x)O_(y); Zr_(x)O_(y);Cu_(x)O_(y); etc. The deposition is usually done at room temperature. Acollimater with an aspect ratio of 1˜5 can be used to improve thefill-in performance. To improve the fill-in performance, the DC bias ofseveral ten to several hundred volts is also used. If desired, theycombination of DC bias and the collimater can be used simultaneously.

The post deposition annealing treatment with vacuum or N₂ ambient orO₂/N₂ mixed ambient as sometimes needed to improve the oxygendistribution of metal oxide. The annealing temperature ranges 400C to600C with an anneal time of less than 2 hours.

2. Reactive deposition: By PVD sputtering or magnetron-sputtering methodwith reactive gases of Ar/O₂, Ar/N₂/O₂, pure O₂, He/O₂, He/N₂/O₂ etc. atthe pressure of 1 mtorr˜100 mtorr, using a target of metal oxide, suchas Ni, Ti, Al, W, Zn, Zr, or Cu etc. The deposition is usually done atroom temperature. A collimater with an aspect ratio of 1˜5 can be usedto improve the fill-in performance. To improve the fill-in performance,a DC bias of several ten to several hundred volts is also used. Ifdesired, the combination of DC bias and the collimater can be usedsimultaneously.

The post deposition annealing treatment with vacuum or N₂ ambient orO₂/N₂ mixed ambient is sometimes needed to improve the oxygendistribution of metal oxide. The annealing temperature ranges 400C to600C with an anneal time of less than 2 hours.

3. Oxidation: By a high temperature oxidation system, such as furnace orRTP system. The temperature ranges from 200C to 700C with pure O₂ orN₂/O₂ mixed gas at a pressure of several mtorr to 1 atm. The time canrange several minute to hours. Another oxidation method is plasmaoxidation. An RF or a DC source plasma with pure O₂ or Ar/O₂ mixed gasor Ar/N₂/O₂ mixed gas at a pressure of 1 mtorr to 100 mtorr is used tooxidize the surface of metal, such as Ni, Ti, Al, W, Zn, Zr, or Cu etc.The oxidation time ranges several seconds to several minutes. Theoxidation temperature ranges room temperature to 300C, depending on thedegree of plasma oxidation.

4. Polymer Material

TCNQ with doping of Cu, C₆₀, Ag etc.

PCBM-TCNQ mixed polymer

Formation method:

1. Evaporation: By thermal evaporation, e-beam evaporation, or molecularbeam epitaxy (MBE) system. A solid-state TCNQ and dopent pellets areco-evaporated in a single chamber. The solid-state TCNQ and dopentpellets are put in a W-boat or a Ta-boat or a ceramic boat. A highelectrical current or an electron-beam is applied to melt the source sothat the materials are mixed and deposited on wafers. There are noreactive chemistries or gases. The deposition is done at a pressure of10-4 torr to 10-10 torr. The wafer temperature ranges from roomtemperature to 200C.

The post deposition annealing treatment with vacuum or N₂ ambient issometimes needed to improve the composition distribution of polymermaterial. The annealing temperature ranges room temperature to 300C withan anneal time of less than 1 hour.

2. Spin-coat: By a spin-coater with the doped-TCNQ solution @ therotation of less than 1000 rpm. After spin-coating, the wafer is put towait the solid-state formation @ room temperature or temperature of lessthan 200C. The waiting time ranges from several minutes to days,depending on the temperature and on the formation conditions.

For additional information on the manufacture, component materials, useand operation of phase change random access memory devices, see U.S.patent application Ser. No. 11/155,067, filed 17 Jun. 2005, entitledThin Film Fuse Phase Change Ram And Manufacturing Method, AttorneyDocket No. MXIC 1621-1.

The above descriptions may have used terms such as above, below, top,bottom, over, under, et cetera. These terms are used to aidunderstanding of the invention are not used in a limiting sense.

While the present invention is disclosed by reference to the preferredembodiments and examples detailed above, it is to be understood thatthese examples are intended in an illustrative rather than in a limitingsense. It is contemplated that modifications and combinations will occurto those skilled in the art, which modifications and combinations willbe within the spirit of the invention and the scope of the followingclaims.

Any and all patents, patent applications and printed publicationsreferred to above are hereby incorporated by reference.

1. A method for making a memory device comprising: providing adielectric material having first and second upwardly and inwardlytapering surfaces and a surface segment connecting the first and secondsurfaces; forming first and second electrodes over the first and secondsurfaces; and forming a memory element over the surface segment toelectrically connect the first and second electrodes.
 2. The methodaccording to claim 1, wherein the dielectric material providing stepcomprises: depositing the dielectric material onto a surface;controlling the dielectric material depositing step to create adielectric material cap comprising said first and second upwardly andinwardly tapering surfaces; and forming the surface segment.
 3. Themethod according to claim 2, wherein the surface segment forming step iscarried out by planarizing the dielectric material.
 4. The methodaccording to claim 1, wherein the electrodes forming step is carried outso that the first and second electrodes directly contact the first andsecond surfaces.
 5. The method according to claim 1, wherein theproviding step is carried out so that the surface segment has a lengthmeasured between the first and second surfaces, the length being between10 nm and 100 nm.
 6. The method according to claim 1, wherein theelectrodes forming step is carried out so that the first and secondelectrodes have outer surfaces generally coplanar with the surfacesegment.
 7. The method according to claim 6, wherein the memory elementis formed so to directly contact the outer surfaces of the first andsecond electrodes and the surface segment of the dielectric material. 8.The method according to claim 1, wherein the memory element forming stepis carried out using a phase change material for the memory element, andthe electrodes forming step is carried out so that the first and secondelectrodes comprise TiN.
 9. The method according to claim 1, wherein thefirst and second surfaces are straight surfaces.
 10. A method for makinga memory device of the type including a bridge-type memory materialelement switchable between electrical property states by the applicationof energy, the method comprising: forming an electrode structurecomprising first and second electrode elements separated by a separationmaterial, the separation material having an end surface; depositing adielectric material onto the end surface using a high density plasma(HDP) deposition procedure; controlling the dielectric materialdepositing step to create a dielectric material cap on the end surface,the dielectric material cap having upwardly and inwardly taperingsurfaces; depositing an electrically conductive material to contact theelectrode elements and to extend along the tapering sides of thedielectric material thus creating first and second electrodes;planarizing the electrically conductive material and the dielectricmaterial cap to create first and second outer surfaces on the first andsecond electrodes and a surface segment on the dielectric material, thesurface segment connecting the tapering sides, the surface segmenthaving a length measured between the tapering sides; controlling atleast one of the dielectric material depositing step and the planarizingstep so that the length is within a chosen dimensional range; andforming a bridge-type memory material element over the surface segmentand in electrical contact with portions of the first and second outersurfaces; whereby energy passing along an inter-electrode path betweenthe first and second electrodes and across the surface segment of thedielectric member is concentrated within the memory material element soto facilitate changing an electrical property state of the memorymaterial element.
 11. The method according to claim 10, wherein theelectrode structure forming step comprises: forming the first and secondelectrodes on a base, each electrode element covered by a protective capelement; forming a layer of the separation material on the base andbetween the electrodes and protective cap elements, the separationmaterial having side surfaces opposite the electrodes and cap elements;and removing the protective cap elements to create open regions boundedby the electrode elements and the side surfaces; and wherein: thedielectric material depositing step deposits the dielectric materialonto the end and side surfaces.
 12. The method according to claim 10,wherein the electrically conductive material depositing step is carriedout so that the electrically conductive material contacts the taperingsides.
 13. The method according to claim 10, wherein the planarizingstep is carried out so that the first and second outer surfaces and thesurface segment are generally coplanar.
 14. The method according toclaim 10, wherein the step of controlling at least one of the dielectricmaterial depositing step and the planarizing step are carried out withchosen dimension being between 10 nm and 100 nm.
 15. The methodaccording to claim 10, wherein the step of controlling at least one ofthe dielectric material depositing step and the planarizing step iscarried out with chosen dimension being between 30 nm and 100 nm. 16.The method according to claim 10, wherein the step of controlling thedielectric material depositing step is carried out so that the inwardlytapering surfaces meet at a junction.
 17. The method according to claim10, wherein the memory material element forming step is carried out sothat the memory material element is in contact with the surface segment.